Design and synthesis of an optimum performance crosslinking resist based on poly (2,4-dimethylstyrene)

P. Miller Tate, P. Heshmati, A. Brown, J. Wills

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1-7
JournalJournal of Materials Science: Materials in Electronics
Volume10
Issue number1
DOIs
Publication statusPublished - Mar 1999
Externally publishedYes

Bibliographical note

Note: This work was supported by DERA Malvern [grant number ELM3653].

Keywords

  • chemistry
  • materials science
  • electronics
  • radiation chemical-yields
  • electron-beam resists
  • polystyrene
  • Chemistry

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