Measurement of profiled surfaces using polarising optical interferometry

Research output: Thesis › Doctoral thesis

Original language	English
Qualification	Doctor of Philosophy (PhD)
Awarding Institution	King's College London (University of London)
Publication status	Accepted/In press - 1996

Department: Department of Physics

Physical Location: This item is held in stock at Kingston University library.

Keywords

@phdthesis{a73cb25bd1f04a4a9e0c0b54fefb234b,

title = "Measurement of profiled surfaces using polarising optical interferometry",

keywords = "microscopy, semiconductor surfaces, optics measurement, Computer science and informatics",

author = "Barman, \{Sarah Ann\}",

note = "Department: Department of Physics Physical Location: This item is held in stock at Kingston University library.",

year = "1996",

language = "English",

school = "King's College London (University of London)",

}

TY - BOOK

T1 - Measurement of profiled surfaces using polarising optical interferometry

AU - Barman, Sarah Ann

N1 - Department: Department of Physics Physical Location: This item is held in stock at Kingston University library.

PY - 1996

Y1 - 1996

KW - microscopy

KW - semiconductor surfaces

KW - optics measurement

KW - Computer science and informatics

M3 - Doctoral thesis

ER -